Nano-hole arrays in thin Au/Pd film on glass, for high speed molecular analysis

O. M. Piciu, M. C.V. Der Krogt, F. Tatar, P. M. Sarro, A. Bossche, M. W. Docter, Y. Garini, I. T. Young

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations


We present an improved process technology based on e-beam lithography and lift-off technique, for fabrication of different nano-hole arrays in optically thick gold/palladium (Au/Pd=60/40) layers on transparent substrates. Every hole serves as a reaction chamber for bio-molecular analysis (e.g. antibody/antigen recognition), as part of a novel atto-liter titer plate device. The optical characterization of the hole-arrays is pursued, both for the transmission of the light and the fluorescence signal through the holes. Array structures with square and hexagonal holes' distribution, with the hole-diameters between 150nm and 200nm and periodicity of 600nm and 900nm are fabricated in 200nm thick layer of gold/palladium alloy on glass. The spectrum of the transmitted light through the hexagonally distributed nano-holes compared to the one of the square distributed nano-holes shows a 20% of light enhancement. Applying Rhodamine G6 solution (0.05mM) on top of the arrays reveals a nine time increased fluorescent signal.

Original languageEnglish
Title of host publication2006 5th IEEE Conference on Sensors
Number of pages4
StatePublished - 2006
Externally publishedYes
Event2006 5th IEEE Conference on Sensors - Daegu, Korea, Republic of
Duration: 22 Oct 200625 Oct 2006

Publication series

NameProceedings of IEEE Sensors


Conference2006 5th IEEE Conference on Sensors
Country/TerritoryKorea, Republic of


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