Monolithic Piezoresistive Stress Sensing Elements in 6H-SiC

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Original language	American English
Title of host publication	Proceedings of the Fifth International Conference on SiC and Related Materials
State	Published - 1993

Place of conference:Washington, DC

Cite this

@inproceedings{7641627cf7864d4e9ba774888bef4117,

title = "Monolithic Piezoresistive Stress Sensing Elements in 6H-SiC",

author = "J. Shor and L. Bemis and A.D. Kurtz",

note = "Place of conference:Washington, DC",

year = "1993",

language = "American English",

booktitle = "Proceedings of the Fifth International Conference on SiC and Related Materials",

}