Monolithic Piezoresistive Stress Sensing Elements in 6H-SiC

Original language	American English
Title of host publication	Proceedings of the Fifth International Conference on SiC and Related Materials
State	Published - 1993

Bibliographical note

Place of conference:Washington, DC

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Shor, J., Bemis, L., & Kurtz, A. D. (1993). Monolithic Piezoresistive Stress Sensing Elements in 6H-SiC. In Proceedings of the Fifth International Conference on SiC and Related Materials

Shor, J. ; Bemis, L. ; Kurtz, A.D. / Monolithic Piezoresistive Stress Sensing Elements in 6H-SiC. Proceedings of the Fifth International Conference on SiC and Related Materials. 1993.

@inproceedings{7641627cf7864d4e9ba774888bef4117,

title = "Monolithic Piezoresistive Stress Sensing Elements in 6H-SiC",

author = "J. Shor and L. Bemis and A.D. Kurtz",

note = "Place of conference:Washington, DC",

year = "1993",

language = "American English",

booktitle = "Proceedings of the Fifth International Conference on SiC and Related Materials",

}

Shor, J, Bemis, L & Kurtz, AD 1993, Monolithic Piezoresistive Stress Sensing Elements in 6H-SiC. in Proceedings of the Fifth International Conference on SiC and Related Materials.

Monolithic Piezoresistive Stress Sensing Elements in 6H-SiC. / Shor, J.; Bemis, L.; Kurtz, A.D.
Proceedings of the Fifth International Conference on SiC and Related Materials. 1993.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Monolithic Piezoresistive Stress Sensing Elements in 6H-SiC

AU - Shor, J.

AU - Bemis, L.

AU - Kurtz, A.D.

N1 - Place of conference:Washington, DC

PY - 1993

Y1 - 1993

M3 - Conference contribution

BT - Proceedings of the Fifth International Conference on SiC and Related Materials

ER -

Shor J, Bemis L, Kurtz AD. Monolithic Piezoresistive Stress Sensing Elements in 6H-SiC. In Proceedings of the Fifth International Conference on SiC and Related Materials. 1993