Modification of silicon nitride with oligo(ethylene glycol)-terminated organophosphonate monolayers
- Johannes D. Bartl
- , Stefano Gremmo
- , Martin Stutzmann
- , Marc Tornow
- , Anna Cattani-Scholz
- Technical University of Munich
- Fraunhofer Research Institution for Microsystems and Solid State Technologies
- Ludwig Maximilian University of Munich
Research output: Contribution to journal › Article › peer-review
4
Scopus
citations