TY - JOUR
T1 - Microstructural study of ultraviolet-assisted pulse laser depoisted indium tin oxide films
AU - Bassim, Nabil D.
AU - Craciun, Valentin
AU - Craciun, Doina
AU - Singh, Rajiv K.
PY - 2002
Y1 - 2002
N2 - The effect of the addition of a non-thermal energy source during deposition, in this case, an ultra violet (UV) mercury lamp, on the microstructures of pulsed laser deposited indium tin oxide films was investigated. It was found that the UV source has the ability to increase the oxygen content and crystallinity of the deposited film through the added contribution of atomic oxygen and ozone into the deposited material at relatively low processing temperatures. Comparisons between the UV and non-UV grown films were made in order to judge the effectiveness of the UV radiation in achieving desirable properties.
AB - The effect of the addition of a non-thermal energy source during deposition, in this case, an ultra violet (UV) mercury lamp, on the microstructures of pulsed laser deposited indium tin oxide films was investigated. It was found that the UV source has the ability to increase the oxygen content and crystallinity of the deposited film through the added contribution of atomic oxygen and ozone into the deposited material at relatively low processing temperatures. Comparisons between the UV and non-UV grown films were made in order to judge the effectiveness of the UV radiation in achieving desirable properties.
UR - http://www.scopus.com/inward/record.url?scp=0036458165&partnerID=8YFLogxK
U2 - 10.1557/proc-721-j6.3
DO - 10.1557/proc-721-j6.3
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AN - SCOPUS:0036458165
SN - 0272-9172
VL - 721
SP - 157
EP - 163
JO - Materials Research Society Symposium - Proceedings
JF - Materials Research Society Symposium - Proceedings
T2 - Magnetic and Electronic Films - Microstructure, Texture and Application to Data Storage
Y2 - 1 April 2002 through 4 April 2002
ER -