Microstructural study of ultraviolet-assisted pulse laser depoisted indium tin oxide films

Nabil D. Bassim, Valentin Craciun, Doina Craciun, Rajiv K. Singh

Research output: Contribution to journalConference articlepeer-review

1 Scopus citations


The effect of the addition of a non-thermal energy source during deposition, in this case, an ultra violet (UV) mercury lamp, on the microstructures of pulsed laser deposited indium tin oxide films was investigated. It was found that the UV source has the ability to increase the oxygen content and crystallinity of the deposited film through the added contribution of atomic oxygen and ozone into the deposited material at relatively low processing temperatures. Comparisons between the UV and non-UV grown films were made in order to judge the effectiveness of the UV radiation in achieving desirable properties.

Original languageEnglish
Pages (from-to)157-163
Number of pages7
JournalMaterials Research Society Symposium - Proceedings
StatePublished - 2002
Externally publishedYes
EventMagnetic and Electronic Films - Microstructure, Texture and Application to Data Storage - San Francisco, United States
Duration: 1 Apr 20024 Apr 2002


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