Microstructural studies of diamond thin films grown by electron cyclotron resonance-assisted chemical vapor deposition

Keyphrases

• Chemical Vapor Deposition 100%
• Microstructural Study 100%
• Electron Cyclotron Resonance 100%
• Diamond Thin Films 100%
• Diamond 66%
• Phonon Lifetime 66%
• Nonuniform Stress 66%
• Intrinsic Stress 66%
• Microstructure 33%
• Microstructural 33%
• Observed Behavior 33%
• Grain Boundary 33%
• Thermal Energy 33%
• Crystal Quality 33%
• Surface Relaxation 33%
• Relaxation Model 33%
• Dominant Source 33%
• Relaxation Mechanism 33%
• Chemical Vapor Deposition Technique 33%
• Yield Quality 33%
• Grain Boundary Relaxation 33%
• Line Defect 33%
• Diamond Growth 33%
• Diamond Precursor 33%
• Hot Filament CVD 33%
• Microwave CVD 33%
• Diamond Seed 33%
• Restructuration 33%

Engineering

• Assisted Chemical Vapor Deposition 100%
• Diamond 100%
• Thin Films 100%
• Cyclotron Resonance 100%
• Grain Boundary 28%
• Chemical Vapor Deposition 28%
• Intrinsic Stress 28%
• Microstructure 14%
• Defects 14%
• Thermal Energy 14%
• Crystalline Quality 14%
• Dominant Source 14%
• Sufficient Time 14%

Material Science

• Diamond 100%
• Chemical Vapor Deposition 100%
• Thin Films 100%
• Grain Boundary 28%
• Film 14%
• Crystalline Material 14%