Micrometer accuracy method for small-scale laser focal spot centroid measurement

Xiaoyan Liu; Zhiwei Lu; Xin Wang; Dexin Ba; Chengyu Zhu

doi:10.1016/j.optlastec.2014.07.016

Micrometer accuracy method for small-scale laser focal spot centroid measurement

Xiaoyan Liu, Zhiwei Lu, Xin Wang, Dexin Ba, Chengyu Zhu

Research output: Contribution to journal › Article › peer-review

10 Scopus citations

Abstract

The measurement of the centroid of small-scale laser focal spot is one of the most promising technologies for small-scale laser focal spot precise positioning. A method of two-dimensional scanning with CCD has been conducted to precisely measure the centroid of the small-scale laser focal spot (diameter in microns) by obtaining the change curve for gray value. The theoretical analysis is consistent with the experimental results.

Original language	English
Pages (from-to)	58-62
Number of pages	5
Journal	Optics and Laser Technology
Volume	66
DOIs	https://doi.org/10.1016/j.optlastec.2014.07.016
State	Published - Mar 2015
Externally published	Yes

Bibliographical note

Funding Information:
This work is supported by the National Natural Science Foundation of China (Grant no. 61008004 ), RFDP 20102302120034 , and the Fundamental Research Funds for the Central Universities (Grant no. HIT. KLOF. 2010035 ).

Publisher Copyright:
© 2014 Elsevier Ltd.

Keywords

Centroid position measurement
Charge coupled device (CCD)
Small-scale laser focal spot

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10.1016/j.optlastec.2014.07.016

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abstract = "The measurement of the centroid of small-scale laser focal spot is one of the most promising technologies for small-scale laser focal spot precise positioning. A method of two-dimensional scanning with CCD has been conducted to precisely measure the centroid of the small-scale laser focal spot (diameter in microns) by obtaining the change curve for gray value. The theoretical analysis is consistent with the experimental results.",

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AU - Lu, Zhiwei

AU - Wang, Xin

AU - Ba, Dexin

AU - Zhu, Chengyu

PY - 2015/3

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KW - Centroid position measurement

KW - Charge coupled device (CCD)

KW - Small-scale laser focal spot

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Micrometer accuracy method for small-scale laser focal spot centroid measurement

Abstract

Bibliographical note

Keywords

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