Micrometer accuracy method for small-scale laser focal spot centroid measurement

Xiaoyan Liu, Zhiwei Lu, Xin Wang, Dexin Ba, Chengyu Zhu

Research output: Contribution to journalArticlepeer-review

12 Scopus citations

Abstract

The measurement of the centroid of small-scale laser focal spot is one of the most promising technologies for small-scale laser focal spot precise positioning. A method of two-dimensional scanning with CCD has been conducted to precisely measure the centroid of the small-scale laser focal spot (diameter in microns) by obtaining the change curve for gray value. The theoretical analysis is consistent with the experimental results.

Original languageEnglish
Pages (from-to)58-62
Number of pages5
JournalOptics and Laser Technology
Volume66
DOIs
StatePublished - Mar 2015
Externally publishedYes

Bibliographical note

Publisher Copyright:
© 2014 Elsevier Ltd.

Funding

This work is supported by the National Natural Science Foundation of China (Grant no. 61008004 ), RFDP 20102302120034 , and the Fundamental Research Funds for the Central Universities (Grant no. HIT. KLOF. 2010035 ).

FundersFunder number
National Natural Science Foundation of ChinaRFDP 20102302120034, 61008004
Fundamental Research Funds for the Central Universities2010035

    Keywords

    • Centroid position measurement
    • Charge coupled device (CCD)
    • Small-scale laser focal spot

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