Micrometer accuracy method for small-scale laser focal spot centroid measurement

Xiaoyan Liu, Zhiwei Lu, Xin Wang, Dexin Ba, Chengyu Zhu

Research output: Contribution to journalArticlepeer-review

10 Scopus citations


The measurement of the centroid of small-scale laser focal spot is one of the most promising technologies for small-scale laser focal spot precise positioning. A method of two-dimensional scanning with CCD has been conducted to precisely measure the centroid of the small-scale laser focal spot (diameter in microns) by obtaining the change curve for gray value. The theoretical analysis is consistent with the experimental results.

Original languageEnglish
Pages (from-to)58-62
Number of pages5
JournalOptics and Laser Technology
StatePublished - Mar 2015
Externally publishedYes

Bibliographical note

Funding Information:
This work is supported by the National Natural Science Foundation of China (Grant no. 61008004 ), RFDP 20102302120034 , and the Fundamental Research Funds for the Central Universities (Grant no. HIT. KLOF. 2010035 ).

Publisher Copyright:
© 2014 Elsevier Ltd.


  • Centroid position measurement
  • Charge coupled device (CCD)
  • Small-scale laser focal spot


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