TY - JOUR
T1 - Meandering-trapezoidal shaped MEMS structure for low frequency vibration based energy harvesting applications
AU - Debnath, Bapi
AU - Kumar, R.
AU - Mohamed Shakeel, P.
N1 - Publisher Copyright:
© 2020 Elsevier Ltd
PY - 2020/12
Y1 - 2020/12
N2 - In this study, we explore the design of new two highly symmetric springs of Meandering-Trapezoidal shaped microelectromechanical system (MEMS) structure based biosensor application with a single proof mass for low frequency vibration based energy harvesting applications. The related harvester design and output were obtained and validated by means of finite elements analysis (FEA) and finite element method (FEM) simulations. We use four different kind of piezoelectric material such as PZT-5A, ZnO, AlN, PVDF on the same dimension of Meandering-Trapezoidal shaped springs and analyze the FEA and FEM output. The maximum output power using PZT-5A, ZnO, AlN, PVDF piezoelectric materials are 117.55 nW, 44.37 nW, 10.58 nW, 0.55 nW over 35.9 Hz, 40.7 Hz, 49.7 Hz, 29.7 Hz resonant frequency, respectively at input acceleration of 0.1 g. From the comparative study, we obtain that piezoelectric material PZT-5A on Meandering-Trapezoidal spring design imply better potential generation.
AB - In this study, we explore the design of new two highly symmetric springs of Meandering-Trapezoidal shaped microelectromechanical system (MEMS) structure based biosensor application with a single proof mass for low frequency vibration based energy harvesting applications. The related harvester design and output were obtained and validated by means of finite elements analysis (FEA) and finite element method (FEM) simulations. We use four different kind of piezoelectric material such as PZT-5A, ZnO, AlN, PVDF on the same dimension of Meandering-Trapezoidal shaped springs and analyze the FEA and FEM output. The maximum output power using PZT-5A, ZnO, AlN, PVDF piezoelectric materials are 117.55 nW, 44.37 nW, 10.58 nW, 0.55 nW over 35.9 Hz, 40.7 Hz, 49.7 Hz, 29.7 Hz resonant frequency, respectively at input acceleration of 0.1 g. From the comparative study, we obtain that piezoelectric material PZT-5A on Meandering-Trapezoidal spring design imply better potential generation.
KW - ANSYS
KW - AlN
KW - COMSOL
KW - Energy harvesting
KW - FEA
KW - FEM
KW - MEMS
KW - Meandering-Trapezoidal shape
KW - PVDF
KW - PZT-5A
KW - Piezoelectric material
KW - Resonant frequency
KW - ZnO
UR - http://www.scopus.com/inward/record.url?scp=85094322667&partnerID=8YFLogxK
U2 - 10.1016/j.seta.2020.100881
DO - 10.1016/j.seta.2020.100881
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AN - SCOPUS:85094322667
SN - 2213-1388
VL - 42
JO - Sustainable Energy Technologies and Assessments
JF - Sustainable Energy Technologies and Assessments
M1 - 100881
ER -