Matrices pattern using FIB; ‘Out-of-the-box’ way of thinking

Y. Fleger; K. Gotlib-Vainshtein; Y. Talyosef

doi:10.1111/jmi.12500

Matrices pattern using FIB; ‘Out-of-the-box’ way of thinking

Y. Fleger, K. Gotlib-Vainshtein, Y. Talyosef

Research output: Contribution to journal › Article › peer-review

3 Scopus citations

Abstract

Focused ion beam (FIB) is an extremely valuable tool in nanopatterning and nanofabrication for potentially high-resolution patterning, especially when refers to He ion beam microscopy. The work presented here demonstrates an ‘out-of-the-box’ method of writing using FIB, which enables creating very large matrices, up to the beam-shift limitation, in short times and with high accuracy unachievable by any other writing technique. The new method allows combining different shapes in nanometric dimensions and high resolutions for wide ranges.

Original language	English
Pages (from-to)	307-312
Number of pages	6
Journal	Journal of Microscopy
Volume	265
Issue number	3
DOIs	https://doi.org/10.1111/jmi.12500
State	Published - 1 Mar 2017

Bibliographical note

Publisher Copyright:
© 2017 The Authors Journal of Microscopy © 2017 Royal Microscopical Society

Funding

We gratefully acknowledge the support provided by the INNI and ISF to the Institute of Nanotechnology and Advanced materials at Bar-Ilan University for this work.

Funders	Funder number
INNI
Israel Science Foundation

Keywords

FIB
He ion beam microscopy
nanopatterning

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10.1111/jmi.12500

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abstract = "Focused ion beam (FIB) is an extremely valuable tool in nanopatterning and nanofabrication for potentially high-resolution patterning, especially when refers to He ion beam microscopy. The work presented here demonstrates an {\textquoteleft}out-of-the-box{\textquoteright} method of writing using FIB, which enables creating very large matrices, up to the beam-shift limitation, in short times and with high accuracy unachievable by any other writing technique. The new method allows combining different shapes in nanometric dimensions and high resolutions for wide ranges.",

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Matrices pattern using FIB; ‘Out-of-the-box’ way of thinking

Abstract

Bibliographical note

Funding

Keywords

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