Magneto-lithography, a simple and inexpensive method for high-throughput, surface patterning

Amos Bardea; Alexander Yoffe

doi:10.1109/ICSEE.2016.7806184

Magneto-lithography, a simple and inexpensive method for high-throughput, surface patterning

Amos Bardea, Alexander Yoffe

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Scopus citations

Abstract

Magneto-lithography (ML) is based on patterning magnetic field on a substrate, using paramagnetic or diamagnetic masks that define the shape and strength of the magnetic field. ML is a 'bottom-up' method but at the same time, it provides desired high throughput capabilities for mass production. It is based on applying a magnetic field on the substrate using paramagnetic metal masks that define the spatial distribution and shape of the applied field. The second component in ML is ferromagnetic nanoparticles that are assembled onto the substrate according to the field induced by the mask. We demonstrate the use of various methods of ML for common microelectronic processes. ML has the potential to become the method of choice in the future, both in the microelectronic industry as well as for chemical patterning of surfaces.

Original language	English
Title of host publication	2016 IEEE International Conference on the Science of Electrical Engineering, ICSEE 2016
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	9781509021529
DOIs	https://doi.org/10.1109/ICSEE.2016.7806184
State	Published - 4 Jan 2017
Externally published	Yes
Event	2016 IEEE International Conference on the Science of Electrical Engineering, ICSEE 2016 - Eilat, Israel Duration: 16 Nov 2016 → 18 Nov 2016

Publication series

Name	2016 IEEE International Conference on the Science of Electrical Engineering, ICSEE 2016

Conference

Conference	2016 IEEE International Conference on the Science of Electrical Engineering, ICSEE 2016
Country/Territory	Israel
City	Eilat
Period	16/11/16 → 18/11/16

Bibliographical note

Publisher Copyright:
© 2016 IEEE.

Keywords

deposition
etch
lithography
mask
nanoparticles
patterning

Access to Document

10.1109/ICSEE.2016.7806184

Cite this

Bardea, A., & Yoffe, A. (2017). Magneto-lithography, a simple and inexpensive method for high-throughput, surface patterning. In 2016 IEEE International Conference on the Science of Electrical Engineering, ICSEE 2016 Article 7806184 (2016 IEEE International Conference on the Science of Electrical Engineering, ICSEE 2016). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ICSEE.2016.7806184

Bardea, Amos ; Yoffe, Alexander. / Magneto-lithography, a simple and inexpensive method for high-throughput, surface patterning. 2016 IEEE International Conference on the Science of Electrical Engineering, ICSEE 2016. Institute of Electrical and Electronics Engineers Inc., 2017. (2016 IEEE International Conference on the Science of Electrical Engineering, ICSEE 2016).

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Bardea, A & Yoffe, A 2017, Magneto-lithography, a simple and inexpensive method for high-throughput, surface patterning. in 2016 IEEE International Conference on the Science of Electrical Engineering, ICSEE 2016., 7806184, 2016 IEEE International Conference on the Science of Electrical Engineering, ICSEE 2016, Institute of Electrical and Electronics Engineers Inc., 2016 IEEE International Conference on the Science of Electrical Engineering, ICSEE 2016, Eilat, Israel, 16/11/16. https://doi.org/10.1109/ICSEE.2016.7806184

Magneto-lithography, a simple and inexpensive method for high-throughput, surface patterning. / Bardea, Amos; Yoffe, Alexander.
2016 IEEE International Conference on the Science of Electrical Engineering, ICSEE 2016. Institute of Electrical and Electronics Engineers Inc., 2017. 7806184 (2016 IEEE International Conference on the Science of Electrical Engineering, ICSEE 2016).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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Bardea A, Yoffe A. Magneto-lithography, a simple and inexpensive method for high-throughput, surface patterning. In 2016 IEEE International Conference on the Science of Electrical Engineering, ICSEE 2016. Institute of Electrical and Electronics Engineers Inc. 2017. 7806184. (2016 IEEE International Conference on the Science of Electrical Engineering, ICSEE 2016). doi: 10.1109/ICSEE.2016.7806184

Magneto-lithography, a simple and inexpensive method for high-throughput, surface patterning

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Keywords

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