Abstract
Europium doped yttrium oxide (Eu: Y2O3) phosphor thin films were grown using a pulsed laser deposition (PLD) technique at varying growth conditions. The structural characterization carried out on a series of Eu: Y2O3 films grown on (100) silicon at substrate temperatures in the range of 250-600 °C and oxygen pressure in the range of 10-5 Torr to 200 mTorr indicated that films were preferentially (111) oriented. Measurements of photoluminescence and cathodoluminescence properties of laser deposited Eu:Y2O3 thin films and powder used for laser target showed that the best in situ grown films were ∼10%-22% as bright as Eu:Y2O3 powder. A postdeposition annealing treatment of Eu:Y2O3 films led to further improvements in their brightness (up to ∼70% with respect to Eu:Y2O3 powder), with cluster sizes of <400 nm.
| Original language | English |
|---|---|
| Pages (from-to) | 404-406 |
| Number of pages | 3 |
| Journal | Applied Physics Letters |
| Volume | 71 |
| Issue number | 3 |
| DOIs | |
| State | Published - 21 Jul 1997 |
| Externally published | Yes |