Low temperature wafer bonding of silicon to InP and silicon to LiNbO3 using self-assembled monolayers

  • V. Artel
  • , I. Bakish
  • , T. Kraus
  • , M. Shubely
  • , Y. Ben-Ezra
  • , E. Shekel
  • , S. Zach
  • , A. Zadok
  • , C. N. Sukenik

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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Engineering

Material Science