Low temperature synthesis of vertically aligned carbon nanotubes with electrical contact to metallic substrates enabled by thermal decomposition of the carbon feedstock

Gilbert D. Nessim, Matteo Seita, Kevin P. O'Brien, A. John Hart, Ryan K. Bonaparte, Robert R. Mitchell, Carl V. Thompson

Research output: Contribution to journalArticlepeer-review

137 Scopus citations

Abstract

Growth of vertically aligned carbon nanotube (CNT) carpets on metallic substrates at low temperatures was achieved by controlled thermal treatment of ethylene and hydrogen at a temperature higher than the substrate temperature. High-resolution transmission electron microscopy showed that nanotubes were crystalline for a preheating temperature of 770 C and a substrate temperature of 500 C. Conductive atomic force microscopy measurements Indicated electrical contact through the CNT carpet to the metallic substrate with an approximate resistance of 35 kΩ for multiwall carpets taller than two micrometers. An analysis of the activation energies indicated that thermal decomposition of the hydrocarbon/hydrogen gas mixture was the rate-limiting step for low-temperature chemical vapor deposition growth of CNTs. These results represent a significant advance toward the goal of replacing copper Interconnects with nanotubes using CMOS-compatible processes.

Original languageEnglish
Pages (from-to)3398-3405
Number of pages8
JournalNano Letters
Volume9
Issue number10
DOIs
StatePublished - 14 Oct 2009
Externally publishedYes

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