Locally oxidized silicon surface-plasmon Schottky detector for telecom regime

Keyphrases

• Silicon Surface 100%
• Surface Plasmon 100%
• Telecom 100%
• Schottky Detector 100%
• On chip 66%
• Internal Photoemission 66%
• Local Oxidation 66%
• Nanophotonics 33%
• Photodetector 33%
• Detection Efficiency 33%
• Metal Layer 33%
• Responsivity 33%
• Nanoplasmonics 33%
• Optical Wavelength 33%
• Low Loss 33%
• Silicon-on-insulator 33%
• Nanoscale Silicon 33%
• Nanodetector 33%
• Complementary Metal-oxide-semiconductor Technology 33%
• Electronic Circuit 33%
• Enhanced Detection 33%
• Telecommunication Wavelength 33%
• Photonic Waveguide 33%
• Self-aligned 33%
• Lateral Misalignment 33%
• Schottky Photodetector 33%
• Insulator Substrate 33%
• Schottky Contact 33%

Engineering

• Surface Plasmon 100%
• Silicon Surface 100%
• Photodetector 66%
• Internals 66%
• Nanoscale 66%
• Realization 66%
• Photoemission 66%
• Metal Layer 33%
• Photonics 33%
• Responsivity 33%
• Silicon on Insulator 33%
• Complementary Metal-Oxide-Semiconductor 33%
• Schottky Barrier 33%
• Waveguide 33%
• Electronic Circuitry 33%

Material Science

• Silicon 100%
• Surface Plasmon 100%
• Oxidation Reaction 33%
• Waveguide 16%
• Complementary Metal-Oxide-Semiconductor Device 16%
• Schottky Barrier 16%