Liquid phase deposition of TiO2 films on different substrate

P. Silickas, Chaim N. Sukenik, Olga Gershevitz, A. V. Valiulis

Research output: Contribution to journalArticlepeer-review

1 Scopus citations


Liquid phase deposition methods are a useful way to create mineral oxide films from aqueous solutions under near-ambient conditions. These approaches have been applied to the creation of ceramic coatings on polymers and on polymer-matrix composites. Control has been achieved over the adherence and crystallinity of the solution-deposited thin films based on controlling the composition of both the deposition solution and the substrate surface. We have also developed techniques for monitoring the surface chemistry of the solid substrate and the deposited ceramic film. The challenge of depositing such films from water, while preventing/minimizing film cracking has also been addressed. Crack-free ceramic films of up to 200 nm thickness have been achieved.

Original languageEnglish
Pages (from-to)589-594
Number of pages6
JournalSolid State Phenomena
StatePublished - 2006

Bibliographical note

Publisher Copyright:
© (2006) Trans Tech Publications, Switzerland.


  • Ceramic thin films
  • Kapton
  • Titanium oxide


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