Liquid phase deposition of TiO2 films on different substrate

P. Silickas, Chaim N. Sukenik, Olga Gershevitz, A. V. Valiulis

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Liquid phase deposition methods are a useful way to create mineral oxide films from aqueous solutions under near-ambient conditions. These approaches have been applied to the creation of ceramic coatings on polymers and on polymer-matrix composites. Control has been achieved over the adherence and crystallinity of the solution-deposited thin films based on controlling the composition of both the deposition solution and the substrate surface. We have also developed techniques for monitoring the surface chemistry of the solid substrate and the deposited ceramic film. The challenge of depositing such films from water, while preventing/minimizing film cracking has also been addressed. Crack-free ceramic films of up to 200 nm thickness have been achieved.

Original languageEnglish
Title of host publicationMechatronic Systems and Materials, MSM 2005 - A Collection of Papers from the 1st International Conference
Subtitle of host publicationMechatronic Systems and Materials
PublisherTrans Tech Publications Ltd
Pages589-594
Number of pages6
ISBN (Print)3908451213, 9783908451211
DOIs
StatePublished - 2006
Event1st International Conference: Mechatronic Systems and Materials, MSM 2005 - Vilnius, Lithuania
Duration: 20 Oct 200523 Oct 2005

Publication series

NameSolid State Phenomena
Volume113
ISSN (Print)1012-0394

Conference

Conference1st International Conference: Mechatronic Systems and Materials, MSM 2005
Country/TerritoryLithuania
CityVilnius
Period20/10/0523/10/05

Keywords

  • Ceramic thin films
  • Kapton
  • Titanium oxide

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