Light scattering from slightly rough dielectric films

Yu S. Kaganovskii, V. D. Freilikher, E. Kanzieper, Y. Nafcha, M. Rosenbluh, I. M. Fuks

Research output: Contribution to journalArticlepeer-review

23 Scopus citations


It is shown that the long-scale (smooth) component of the roughness spectrum of a slightly rough dielectric layer critically affects the angular distribution of radiation scattered from the surface. The interference pattern obtained from a sample with only small-scale roughness differs drastically from a sample with the same small-scale roughness but possessing slight (of the order λ/10) variation of the thickness of the dielectric layer. It is shown that when interference phenomena are significant and the dielectric film has long-scale roughness, conventional perturbation theory is invalid, even if the rms of roughness is much smaller than the wavelength. A model is presented that correctly predicts the measured angular intensity distributions in the scattered-light field for samples that possess arbitrary scales of roughness.

Original languageEnglish
Pages (from-to)331-338
Number of pages8
JournalJournal of the Optical Society of America A: Optics and Image Science, and Vision
Issue number2
StatePublished - Feb 1999


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