Layered Si-Ti oxide thin films with tailored electrical and optical properties by catalytic tandem MLD-ALD

  • Boaz Kalderon
  • , Debabrata Sarkar
  • , Krushnamurty Killi
  • , Tamuz Danzig
  • , Doron Azulay
  • , Oded Millo
  • , Gili Cohen-Taguri
  • , Roie Yerushalmi

Research output: Contribution to journal › Article › peer-review

3 Scopus citations

Fingerprint

Dive into the research topics of 'Layered Si-Ti oxide thin films with tailored electrical and optical properties by catalytic tandem MLD-ALD'. Together they form a unique fingerprint.

Keyphrases

Material Science

Engineering

Chemical Engineering