Abstract
In this paper we propose a modulated laser system combining a speckle pattern tracking method for surface tilting changes sensing with an interferometer for surface z-axis changes sensing at the same scan time.
| Original language | English |
|---|---|
| Title of host publication | CLEO |
| Subtitle of host publication | Applications and Technology, CLEO_AT 2017 |
| Publisher | Optica Publishing Group (formerly OSA) |
| ISBN (Print) | 9781943580279 |
| DOIs | |
| State | Published - 2017 |
| Event | CLEO: Applications and Technology, CLEO_AT 2017 - San Jose, United States Duration: 14 May 2017 → 19 May 2017 |
Publication series
| Name | Optics InfoBase Conference Papers |
|---|---|
| Volume | Part F43-CLEO_AT 2017 |
| ISSN (Electronic) | 2162-2701 |
Conference
| Conference | CLEO: Applications and Technology, CLEO_AT 2017 |
|---|---|
| Country/Territory | United States |
| City | San Jose |
| Period | 14/05/17 → 19/05/17 |
Bibliographical note
Publisher Copyright:© 2017 OSA.
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