Laser Printing of Multilayered Alternately Conducting and Insulating Microstructures

Eitan Edri, Nina Armon, Ehud Greenberg, Shlomit Moshe-Tsurel, Danielle Lubotzky, Tommaso Salzillo, Ilana Perelshtein, Maria Tkachev, Olga Girshevitz, Hagay Shpaisman

Research output: Contribution to journalArticlepeer-review

21 Scopus citations

Abstract

Production of multilayered microstructures composed of conducting and insulating materials is of great interest as they can be utilized as microelectronic components. Current proposed fabrication methods of these microstructures include top-down and bottom-up methods, each having their own set of drawbacks. Laser-based methods were shown to pattern various materials with micron/sub-micron resolution; however, multilayered structures demonstrating conducting/insulating/conducting properties were not yet realized. Here, we demonstrate laser printing of multilayered microstructures consisting of conducting platinum and insulating silicon oxide layers by a combination of thermally driven reactions with microbubble-assisted printing. PtCl2 dissolved in N-methyl-2-pyrrolidone (NMP) was used as a precursor to form conducting Pt layers, while tetraethyl orthosilicate dissolved in NMP formed insulating silicon oxide layers identified by Raman spectroscopy. We demonstrate control over the height of the insulating layer between ∼50 and 250 nm by varying the laser power and number of iterations. The resistivity of the silicon oxide layer at 0.5 V was 1.5 × 1011 ωm. Other materials that we studied were found to be porous and prone to cracking, rendering them irrelevant as insulators. Finally, we show how microfluidics can enhance multilayered laser microprinting by quickly switching between precursors. The concepts presented here could provide new opportunities for simple fabrication of multilayered microelectronic devices.

Original languageEnglish
Pages (from-to)36416-36425
Number of pages10
JournalACS applied materials & interfaces
Volume13
Issue number30
DOIs
StatePublished - 4 Aug 2021

Bibliographical note

Publisher Copyright:
© 2021 The Authors. Published by American Chemical Society.

Funding

This research was partially supported by the Israeli Science Foundation (grant no. 952/19).

FundersFunder number
Israel Science Foundation952/19

    Keywords

    • conducting/insulating
    • microbubble
    • microfluidics
    • multilayered structures
    • pattern formation

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