Laser-induced explosive boiling during nanosecond laser ablation of silicon

V. Craciun, N. Bassim, D. Craciun, C. Boulmer-Leborgne, J. Hermann, R. K. Singh

Research output: Contribution to journalConference articlepeer-review


The surface morphology of single crystal (100) Si wafers irradiated by 266 nm and 1064 laser pulses emitted by a solid state Nd:YAG laser has been investigated. The morphology of the bottom of craters remained flat and almost featureless after 266 nm single or multipulse laser irradiation up to the maximum fluence of 18 J/cm2 used in this study. The rims of the craters showed signs of radial liquid flow but it was apparent that the vaporization process was confined to the surface region. A different morphology was observed on the bottom of the craters formed by the 1064 nm wavelength laser pulses. Because this wavelength is absorbed in volume, α < 104 cm-1, a rather thick liquid Si pool formed at the surface. For laser fluences higher than 3-5 J/cm2 evidence of boiling sites were observed on the bottom of the crater, especially for multipulse irradiation. An evolution of surface morphology, from waves towards deep cavities was observed with the increase of pulse number. By analyzing the cavity formation mechanisms, their density and shape, we suggest that they were induced by heterogeneous boiling and not homogeneous boiling.

Original languageEnglish
Pages (from-to)203-209
Number of pages7
JournalProceedings of SPIE - The International Society for Optical Engineering
StatePublished - 2002
Externally publishedYes
EventALT '01 International Conference on 'Advanced Laser Technologies - Constanta, Romania
Duration: 11 Sep 200114 Sep 2001


Support for this work from the grant 6157/B.3 from ANSTI and CNRS France–Romanian Academy Scientific Collaboration Agreement is gratefully acknowledged.

FundersFunder number
Centre National de la Recherche Scientifique


    • Droplets
    • Nanosecond laser irradiation
    • Phase explosion
    • Volume boiling


    Dive into the research topics of 'Laser-induced explosive boiling during nanosecond laser ablation of silicon'. Together they form a unique fingerprint.

    Cite this