TY - JOUR
T1 - Kinetics and mechanism of the C49 to C54 titanium disilicide phase transformation in nitrogen ambient
AU - Nagabushnam, R. V.
AU - Sharan, S.
AU - Sandhu, G.
AU - Rakesh, V. R.
AU - Singh, R. K.
AU - Tiwari, P.
PY - 1996
Y1 - 1996
N2 - The kinetics of the C49 to C54 TiSi2 phase transformation in nitrogen ambient have been investigated in a temperature range from 700 °C to 800 °C for a range of titanium film thicknesses (135 angstrom to 350 angstrom) using sheet resistance measurement, Auger electron spectroscopy(AES), Rutherford backscattering spectroscopy(RBS) and transmission electron microscopy(TEM). About 80% of the titanium converts to titanium silicide with the rest converting to titanium nitride. The activation energies obtained for the C49 to C54 transformation in nitrogen ambient are lower, at least by 2-2.25 eV, than that obtained for the transformations occurring either in argon ambient or vacuum environment. This has been explained with a model involving stress state of titanium silicide film with titanium nitride overlayer.
AB - The kinetics of the C49 to C54 TiSi2 phase transformation in nitrogen ambient have been investigated in a temperature range from 700 °C to 800 °C for a range of titanium film thicknesses (135 angstrom to 350 angstrom) using sheet resistance measurement, Auger electron spectroscopy(AES), Rutherford backscattering spectroscopy(RBS) and transmission electron microscopy(TEM). About 80% of the titanium converts to titanium silicide with the rest converting to titanium nitride. The activation energies obtained for the C49 to C54 transformation in nitrogen ambient are lower, at least by 2-2.25 eV, than that obtained for the transformations occurring either in argon ambient or vacuum environment. This has been explained with a model involving stress state of titanium silicide film with titanium nitride overlayer.
UR - http://www.scopus.com/inward/record.url?scp=0029777235&partnerID=8YFLogxK
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AN - SCOPUS:0029777235
SN - 0272-9172
VL - 402
SP - 113
EP - 118
JO - Materials Research Society Symposium - Proceedings
JF - Materials Research Society Symposium - Proceedings
T2 - Proceedings of the 1995 MRS Fall Symposium
Y2 - 27 November 1995 through 30 November 1995
ER -