Ion beam pattering of nano-gratings on SiC surface

Y. S. Katharria; Sandeep Kumar; A. T. Sharma; Devki Chauhan; D. Kanjilal

doi:10.1016/j.surfcoat.2009.02.112

Ion beam pattering of nano-gratings on SiC surface

Y. S. Katharria, Sandeep Kumar, A. T. Sharma, Devki Chauhan, D. Kanjilal

Research output: Contribution to journal › Article › peer-review

4 Scopus citations

Abstract

Morphological evolution of 6H-SiC (0001) surface induced by elastic Ar⁺ ions collisions has been studied using atomic force microscopy (AFM). Ion irradiation was performed at an angle of 60° with respect to the surface normal of the samples. Dual-dots appear at SiC surface at initial ion fluence (φ{symbol}) of 6 × 10¹⁶ cm^{- 2}, while the surface undergoes a self-organization into wavy grating-like ripples features at higher φ{symbol} values. These features show a visual dispersion behavior for white light. Observed features such as amplitude and wavelength of the ripples are explained by taking into account the linear continuum model of Bradley and Harper (BH) and its subsequent modifications.

Original language	English
Pages (from-to)	2442-2445
Number of pages	4
Journal	Surface and Coatings Technology
Volume	203
Issue number	17-18
DOIs	https://doi.org/10.1016/j.surfcoat.2009.02.112
State	Published - 15 Jun 2009
Externally published	Yes

Keywords

Atomic force microscopy
Nano-dots
Ripples
Sputtering

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10.1016/j.surfcoat.2009.02.112

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abstract = "Morphological evolution of 6H-SiC (0001) surface induced by elastic Ar+ ions collisions has been studied using atomic force microscopy (AFM). Ion irradiation was performed at an angle of 60° with respect to the surface normal of the samples. Dual-dots appear at SiC surface at initial ion fluence (φ{symbol}) of 6 × 1016 cm- 2, while the surface undergoes a self-organization into wavy grating-like ripples features at higher φ{symbol} values. These features show a visual dispersion behavior for white light. Observed features such as amplitude and wavelength of the ripples are explained by taking into account the linear continuum model of Bradley and Harper (BH) and its subsequent modifications.",

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AU - Katharria, Y. S.

AU - Kumar, Sandeep

AU - Sharma, A. T.

AU - Chauhan, Devki

AU - Kanjilal, D.

PY - 2009/6/15

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AB - Morphological evolution of 6H-SiC (0001) surface induced by elastic Ar+ ions collisions has been studied using atomic force microscopy (AFM). Ion irradiation was performed at an angle of 60° with respect to the surface normal of the samples. Dual-dots appear at SiC surface at initial ion fluence (φ{symbol}) of 6 × 1016 cm- 2, while the surface undergoes a self-organization into wavy grating-like ripples features at higher φ{symbol} values. These features show a visual dispersion behavior for white light. Observed features such as amplitude and wavelength of the ripples are explained by taking into account the linear continuum model of Bradley and Harper (BH) and its subsequent modifications.

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Ion beam pattering of nano-gratings on SiC surface

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Keywords

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