TY - JOUR
T1 - Influence of SHI irradiation on the formation of buried SiC
AU - Katharria, Y. S.
AU - Kumar, Sandeep
AU - Kanjilal, D.
PY - 2007/7
Y1 - 2007/7
N2 - Silicon carbide (SiC) precipitates buried in Si(1 0 0) substrates were synthesized by ion implantation of 50 keV and 150 keV C+ ions at different fluences. Two sets of samples were subsequently annealed at 850 °C and 1000 °C for 30 min. Fourier transform infrared (FTIR) spectroscopy studies and X-ray diffraction (XRD) analysis confirmed formation of β-SiC precipitates in the samples. Ion irradiation with 100 MeV Ag7+ ions at room temperature does not induce significant change in the precipitates. It could be interpreted from the FTIR observations that ion irradiation may induce nucleation in Si + C solution created by ion implantation of C in Si. Modifications induced by swift heavy ion irradiation are found to be dependent on implantation energy of C+ ions.
AB - Silicon carbide (SiC) precipitates buried in Si(1 0 0) substrates were synthesized by ion implantation of 50 keV and 150 keV C+ ions at different fluences. Two sets of samples were subsequently annealed at 850 °C and 1000 °C for 30 min. Fourier transform infrared (FTIR) spectroscopy studies and X-ray diffraction (XRD) analysis confirmed formation of β-SiC precipitates in the samples. Ion irradiation with 100 MeV Ag7+ ions at room temperature does not induce significant change in the precipitates. It could be interpreted from the FTIR observations that ion irradiation may induce nucleation in Si + C solution created by ion implantation of C in Si. Modifications induced by swift heavy ion irradiation are found to be dependent on implantation energy of C+ ions.
KW - Fourier transform infrared spectroscopy
KW - Ion implantation
KW - Swift heavy ion irradiation
KW - X-ray diffraction
UR - http://www.scopus.com/inward/record.url?scp=34547696908&partnerID=8YFLogxK
U2 - 10.1016/j.nimb.2007.04.213
DO - 10.1016/j.nimb.2007.04.213
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AN - SCOPUS:34547696908
SN - 0168-583X
VL - 260
SP - 563
EP - 566
JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
IS - 2
ER -