Influence of neutron transmutation doping on optical Properties of Ge nanocrystals prepared by ion implantation

  • Shaobo Dun
  • , Tiecheng Lu
  • , Qiang Hu
  • , Ningkang Huang
  • , Songbao Zhang
  • , Bin Tang
  • , Junlong Dai
  • , Lev Resnick
  • , Issai Shlimak
  • , Sha Zhu
  • , Qiangmin Wei
  • , Lumin Wang

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Ge nanocrystals embedded in an amorphous SiO2 film on Si matrix were prepared by ion implantation and subsequent annealing. Neutron transmutation doping (NTD) technique was used to dope Ge nanocrystals with As impurities. The microstructure, phase and photoluminescence of NTDed Ge nanocrystals were analyzed and compared with undopecl Ge nanocrystals. A new photoluminescence peak related to As impurities was found. It is discovered that impurities are expelled from larger clusters resulted from Ge nanocrystals aggregation on the sample surface. To prevent nanocrystal aggregation and assure uniform doping of As, it is necessary to adopt appropriate implantation and annealing conditions.

Original languageEnglish
Title of host publicationGrowth, Modification and Analysis by Ion Beams at the Nanoscale
PublisherMaterials Research Society
Pages153-158
Number of pages6
ISBN (Print)1558998632, 9781558998636
DOIs
StatePublished - 2005
Event2005 MRS Fall Meeting - Boston, MA, United States
Duration: 28 Nov 20052 Dec 2005

Publication series

NameMaterials Research Society Symposium Proceedings
Volume908
ISSN (Print)0272-9172

Conference

Conference2005 MRS Fall Meeting
Country/TerritoryUnited States
CityBoston, MA
Period28/11/052/12/05

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