TY - GEN
T1 - Influence of neutron transmutation doping on optical Properties of Ge nanocrystals prepared by ion implantation
AU - Dun, Shaobo
AU - Lu, Tiecheng
AU - Hu, Qiang
AU - Huang, Ningkang
AU - Zhang, Songbao
AU - Tang, Bin
AU - Dai, Junlong
AU - Resnick, Lev
AU - Shlimak, Issai
AU - Zhu, Sha
AU - Wei, Qiangmin
AU - Wang, Lumin
PY - 2005
Y1 - 2005
N2 - Ge nanocrystals embedded in an amorphous SiO2 film on Si matrix were prepared by ion implantation and subsequent annealing. Neutron transmutation doping (NTD) technique was used to dope Ge nanocrystals with As impurities. The microstructure, phase and photoluminescence of NTDed Ge nanocrystals were analyzed and compared with undopecl Ge nanocrystals. A new photoluminescence peak related to As impurities was found. It is discovered that impurities are expelled from larger clusters resulted from Ge nanocrystals aggregation on the sample surface. To prevent nanocrystal aggregation and assure uniform doping of As, it is necessary to adopt appropriate implantation and annealing conditions.
AB - Ge nanocrystals embedded in an amorphous SiO2 film on Si matrix were prepared by ion implantation and subsequent annealing. Neutron transmutation doping (NTD) technique was used to dope Ge nanocrystals with As impurities. The microstructure, phase and photoluminescence of NTDed Ge nanocrystals were analyzed and compared with undopecl Ge nanocrystals. A new photoluminescence peak related to As impurities was found. It is discovered that impurities are expelled from larger clusters resulted from Ge nanocrystals aggregation on the sample surface. To prevent nanocrystal aggregation and assure uniform doping of As, it is necessary to adopt appropriate implantation and annealing conditions.
UR - https://www.scopus.com/pages/publications/34249933171
U2 - 10.1557/proc-0908-oo14-11
DO - 10.1557/proc-0908-oo14-11
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AN - SCOPUS:34249933171
SN - 1558998632
SN - 9781558998636
T3 - Materials Research Society Symposium Proceedings
SP - 153
EP - 158
BT - Growth, Modification and Analysis by Ion Beams at the Nanoscale
PB - Materials Research Society
T2 - 2005 MRS Fall Meeting
Y2 - 28 November 2005 through 2 December 2005
ER -