Abstract
Nanosecond laser pulsed ablation is a common technique for micromachining of microelectronics. Recent laser technologies use temporal shaping of single pulses to create ‘pulse bursts' of several short consecutive pulses at several times the laser repetition rate with a reduced peak power, achieving significantly higher average powers. In this study we tested the effects of pulse bursts on ablation of multilayer PCB. We show that by implementing temporal beam shaping, we were able to increase the throughput by a factor of 40%. To gain a deeper insight of the laser mater interactions of ablation with pulse bursts, we studied the plasma emissions and monitor the process with a time resolution of several nanoseconds. These results demonstrate the importance of temporal pulse shapes for laser micromachining in the microelectronics industry.
| Original language | English |
|---|---|
| Pages (from-to) | 1-5 |
| Number of pages | 5 |
| Journal | Journal of Laser Micro Nanoengineering |
| Volume | 16 |
| Issue number | 1 |
| DOIs | |
| State | Published - 2021 |
Bibliographical note
Publisher Copyright:©2021,JLMN-Journal of Laser Micro/Nanoengineering.All rights reserved.
Funding
(1) The authors would like to acknowledge Dr. Roman Vander and Mr. Boris Kling for their professional discussions and advice. (2) This work received funding from IIA (Israel Innovation Authority), Project No. 65500, “Laser-Matter-Interactions” (LMI).
| Funders | Funder number |
|---|---|
| IIA | |
| Israel Innovation Authority | 65500 |
Keywords
- microelectronics
- nanosecond ablation
- plasma dynamics
- pump-probe microscopy
- temporal pulse shaping