Influence of heavier impurity deposition on surface morphology development and sputtering behavior explored in multiple linear plasma devices

D. Nishijima, A. Kreter, M. J. Baldwin, D. Borodin, A. Eksaeva, D. Hwangbo, S. Kajita, M. Miyamoto, N. Ohno, M. Patino, A. Pospieszczyk, M. Rasinski, T. Schlummer, A. Terra, R. P. Doerner

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Engineering

Material Science