In-situ patterned laser deposition of high-Tc Y-Ba-Cu-O superconducting thin films

R. K. Singh, J. Narayan, A. K. Singh, C. B. Lee

Research output: Contribution to journalArticlepeer-review

28 Scopus citations


Reliable critical current density measurements have been sucessfully carried out on superconducting thin films which were in situ patterned during the laser deposition process. This method does not require cumbersome wet etching or post-ion-implantation patterning steps for measuring transport critical current densities of thin films. Epitaxial films of YBa 2Cu3O7 on (100) SrTiO3 and (100)yttria-stabilized ZrO2 (YSZ) were fabricated at low processing temperatures (500-650 °C) by the excimer laser ablation technique in an oxygen ambient coupled with a dc bias voltage of +300 V on an interposing ring between the substrate and the target. Steel masks of various lateral dimensions were placed close to the substrate to generate various patterns. The superconducting properties obtained at the masked and unmasked areas of the film were similar and reproducible. The thickness and width of the mask have been found to be critical in controlling the superconducting properties of the patterned thin films. Excellent quality superconducting thin films were obtained in the patterned areas. The critical temperature of the films was found to lie in the range of 88-90 K, and the best critical current density values (at 77 K and zero magnetic field) of 1.0×106, 5.0×106, and 6.5×106 A/cm2 were obtained for films deposited on (100) YSZ, (100) SrTiO3, and (100) LaAlO3, respectively.

Original languageEnglish
Pages (from-to)3448-3451
Number of pages4
JournalJournal of Applied Physics
Issue number7
StatePublished - 1990
Externally publishedYes


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