Fingerprint
Dive into the research topics of 'In situ lateral force technique for dynamic surface roughness measurements during chemical mechanical polishing'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
In situ lateral force technique for dynamic surface roughness measurements during chemical mechanical polishing
- U. Mahajan
- , M. Bielmann
- , R. K. Singh
Research output: Contribution to journal › Article › peer-review
20
Scopus
citations