Abstract
The effect of irradiation by 650 keV 14N5+ ions on the electrical characteristics of a Au/GaAs Schottky diode is analyzed with an in-situ current-voltage characterization technique. The Schottky barrier height (SBH) is found to be 0.55 ± 0.01 eV for an un-irradiated diode and remains practically unchanged (0.54 ± 0.01 eV) at the highest ion irradiation fluence of 1 × 1014 ions cm- 2. The ideality factor is found as 2.5 for the as-prepared diode and increases to 3.1 at the highest ion irradiation fluence. The results are discussed with reference to the energy loss mechanism of a swift heavy ion as it passes through the metal-semiconductor interface.
Original language | English |
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Pages (from-to) | 2667-2669 |
Number of pages | 3 |
Journal | Surface and Coatings Technology |
Volume | 203 |
Issue number | 17-18 |
DOIs | |
State | Published - 15 Jun 2009 |
Externally published | Yes |
Keywords
- Ideality factor
- In-situ I-V
- Ion irradiation
- Schottky barrier height
- Schottky diode