Abstract
In this paper, we demonstrated a method to super-resolved Raman spectroscopy, which improves the resolution of pure silicon spectra. Experimental investigations were carried out on the spectra of pure silicon. A tunable Fabry-Perot (F-P) filter was added to the classical Raman setup in which measuring the spectra for different states of the F-P filter coupled with decoded experimental results yielded a spectrum of higher resolution having a reduced linewidth in the pure silicon spectrum. Therefore, this method can be very helpful for improving the detection of silicon material in nanostructures using a low resolution Raman spectroscopy system.
Original language | English |
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Article number | 075801 |
Journal | Journal of Optics (United Kingdom) |
Volume | 21 |
Issue number | 7 |
DOIs | |
State | Published - 2019 |
Bibliographical note
Publisher Copyright:© 2019 IOP Publishing Ltd.
Keywords
- Raman
- silicon
- super-resolution