Improving Raman spectra of pure silicon using super-resolved method

Dror Malka, Binyamin Adler Berke, Yaakov Tischler, Zeev Zalevsky

Research output: Contribution to journalArticlepeer-review

23 Scopus citations

Abstract

In this paper, we demonstrated a method to super-resolved Raman spectroscopy, which improves the resolution of pure silicon spectra. Experimental investigations were carried out on the spectra of pure silicon. A tunable Fabry-Perot (F-P) filter was added to the classical Raman setup in which measuring the spectra for different states of the F-P filter coupled with decoded experimental results yielded a spectrum of higher resolution having a reduced linewidth in the pure silicon spectrum. Therefore, this method can be very helpful for improving the detection of silicon material in nanostructures using a low resolution Raman spectroscopy system.

Original languageEnglish
Article number075801
JournalJournal of Optics (United Kingdom)
Volume21
Issue number7
DOIs
StatePublished - 2019

Bibliographical note

Publisher Copyright:
© 2019 IOP Publishing Ltd.

Keywords

  • Raman
  • silicon
  • super-resolution

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