TY - GEN
T1 - Improving failure analysis navigation using optical super resolved imaging
AU - Gur, Eran
AU - Weizman, Yoav
AU - Zalevsky, Zeev
PY - 2009
Y1 - 2009
N2 - The authors present a new numerical approach for improving the resolving power of low resolution images which is applied for failure analysis of microelectronic chips. The resolution improvement is based upon a numerical iterative comparison between a high resolution layout image and a low resolution experimentally captured image of the same region of interest.
AB - The authors present a new numerical approach for improving the resolving power of low resolution images which is applied for failure analysis of microelectronic chips. The resolution improvement is based upon a numerical iterative comparison between a high resolution layout image and a low resolution experimentally captured image of the same region of interest.
UR - http://www.scopus.com/inward/record.url?scp=71049188879&partnerID=8YFLogxK
U2 - 10.1109/ipfa.2009.5232708
DO - 10.1109/ipfa.2009.5232708
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AN - SCOPUS:71049188879
SN - 9781424439102
T3 - Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA
SP - 19
EP - 23
BT - Proceedings of the 2009 16th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA 2009
T2 - 2009 16th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits, IPFA 2009
Y2 - 6 July 2009 through 10 July 2009
ER -