Hydrodynamic approximation for ions in high-pressure rf glow discharges

V. Halpern, E. V. Kharitonov

Research output: Contribution to journalArticlepeer-review

Abstract

The use of the hydrodynamic approximation to describe the motion of ions in weakly ionized plasmas subjected to a high-frequency external electric field is critically examined. It is shown that if the frequency of this field is comparable with or larger than the ion collision frequency, then the response of the ions to the alternating electric field cannot be described by ion mobility. A possible alternative approach to the problem is presented.

Original languageEnglish
Pages (from-to)811-812
Number of pages2
JournalPhysical Review E
Volume51
Issue number1
DOIs
StatePublished - 1995

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