High resolution fabrication of interconnection lines using picosecond laser and controlled deposition of gold nanoparticles

Asaf Shahmoon, Johnnes Strauß, Hadar Zafri, Michael Schmidt, Zeev Zalevsky

Research output: Contribution to journalConference articlepeer-review

Abstract

In this paper we present the fabrication procedure as well as the preliminary experimental results of a novel method for construction of high resolution nanometric interconnection lines. The fabrication procedure relies on a self-assembly process of gold nanoparticles at specific predetermined nanostructures. The nanostructures for the self-assembly process are based on the focused ion beam (FIB) or scanning electron beam (SEM) technology. The assembled nanoparticles are being illuminated using a picosecond laser with a wavelength of 532 nm. Different pulse energies have been investigated. The paper aimed at developing a novel and reliable process for fabrication of interconnection lines encompass three different disciplines, self-assembly of nanometric particles, optics and microelectronic.

Original languageEnglish
Pages (from-to)188-193
Number of pages6
JournalPhysics Procedia
Volume83
DOIs
StatePublished - 2016
Event9th International Conference on Photonic Technologies, LANE 2016 - Furth, Germany
Duration: 19 Sep 201622 Sep 2016

Bibliographical note

Publisher Copyright:
© 2016 The Authors.

Keywords

  • Interconnection lines
  • nanofabrication
  • nanoparticles
  • picosecond laser

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