High-precision small-scale laser focal spot measurements

Z. W. Lu; X. Y. Liu; X. Wang; D. X. Ba; Z. H. Jiang; P. Y. Du; C. Y. Zhu

doi:10.1017/S0263034612001073

High-precision small-scale laser focal spot measurements

Z. W. Lu, X. Y. Liu, X. Wang, D. X. Ba, Z. H. Jiang, P. Y. Du, C. Y. Zhu

Research output: Contribution to journal › Article › peer-review

7 Scopus citations

Abstract

In this paper, a method of two-dimensional fine-scanning with charge coupled device has been conducted to precisely measure spatial position and intensity distribution of small-scale focal spot (diameter in microns). The measurement accuracy of the small-scale focal spot position is better than 1 Âm when the fluctuations of the light energy and background noise are relatively small. The theoretical analysis is consistent with the experimental results.

Original language	English
Pages (from-to)	177-183
Number of pages	7
Journal	Laser and Particle Beams
Volume	31
Issue number	1
DOIs	https://doi.org/10.1017/S0263034612001073
State	Published - 2013
Externally published	Yes

Keywords

Centroid position
Charge coupled device
High-precision measurement
Relative intensity distribution
Small-scale focal spot

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10.1017/S0263034612001073

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@article{e630bf2cc46149b08fbb8b0ded7bdb6b,

title = "High-precision small-scale laser focal spot measurements",

abstract = "In this paper, a method of two-dimensional fine-scanning with charge coupled device has been conducted to precisely measure spatial position and intensity distribution of small-scale focal spot (diameter in microns). The measurement accuracy of the small-scale focal spot position is better than 1 {\^A}m when the fluctuations of the light energy and background noise are relatively small. The theoretical analysis is consistent with the experimental results.",

keywords = "Centroid position, Charge coupled device, High-precision measurement, Relative intensity distribution, Small-scale focal spot",

author = "Lu, {Z. W.} and Liu, {X. Y.} and X. Wang and Ba, {D. X.} and Jiang, {Z. H.} and Du, {P. Y.} and Zhu, {C. Y.}",

year = "2013",

doi = "10.1017/S0263034612001073",

language = "אנגלית",

volume = "31",

pages = "177--183",

journal = "Laser and Particle Beams",

issn = "0263-0346",

publisher = "Hindawi",

number = "1",

}

TY - JOUR

T1 - High-precision small-scale laser focal spot measurements

AU - Lu, Z. W.

AU - Liu, X. Y.

AU - Wang, X.

AU - Ba, D. X.

AU - Jiang, Z. H.

AU - Du, P. Y.

AU - Zhu, C. Y.

PY - 2013

Y1 - 2013

N2 - In this paper, a method of two-dimensional fine-scanning with charge coupled device has been conducted to precisely measure spatial position and intensity distribution of small-scale focal spot (diameter in microns). The measurement accuracy of the small-scale focal spot position is better than 1 Âm when the fluctuations of the light energy and background noise are relatively small. The theoretical analysis is consistent with the experimental results.

AB - In this paper, a method of two-dimensional fine-scanning with charge coupled device has been conducted to precisely measure spatial position and intensity distribution of small-scale focal spot (diameter in microns). The measurement accuracy of the small-scale focal spot position is better than 1 Âm when the fluctuations of the light energy and background noise are relatively small. The theoretical analysis is consistent with the experimental results.

KW - Centroid position

KW - Charge coupled device

KW - High-precision measurement

KW - Relative intensity distribution

KW - Small-scale focal spot

UR - http://www.scopus.com/inward/record.url?scp=84874479191&partnerID=8YFLogxK

U2 - 10.1017/S0263034612001073

DO - 10.1017/S0263034612001073

M3 - ???researchoutput.researchoutputtypes.contributiontojournal.article???

AN - SCOPUS:84874479191

SN - 0263-0346

VL - 31

SP - 177

EP - 183

JO - Laser and Particle Beams

JF - Laser and Particle Beams

IS - 1

ER -

High-precision small-scale laser focal spot measurements

Abstract

Keywords

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