Abstract
This paper proposed Hetero-Dielectric (HD) Oxide-Engineered Junctionless double gate all around nanotube (DGAA-NT) FET for performance enhancement in low power circuits. In HD configuration, hafnium based high-k dielectric (HfO2 and HfxTi1-xO2) as gate oxide (for inner as well as outer gate oxide) is introduced on source side and SiO2 on drain side of HD JL-DGAA-NT FET. The tunnelling width and source-to-channel barrier height are significantly increased in the HD-JL-DGAA-NT FET as compared JL-DGAA-NT FET, causes the reduction in leakage current an order of 10−14 to 10−17 and ION/IOFF ratio increased by 54%. It has been observed that side spacer with suitable dielectric constant can be considered to improve the performance of device. Further, Subthreshold slope (SS) and DIBL and ION/IOFF current ratio has shown tremendous improvement on reducing channel thickness from 10 nm to 8 nm. It has been found that in HD-JL-DGAA-NT FET provides 25% and 57% improvement in SS and DIBL respectively. Therefore, HD-JL-DGAA-NT FET with adequate design parameters and dielectric material may be used for future digital applications.
| Original language | English |
|---|---|
| Pages (from-to) | 2177-2184 |
| Number of pages | 8 |
| Journal | Silicon |
| Volume | 13 |
| Issue number | 7 |
| DOIs | |
| State | Published - Jul 2021 |
| Externally published | Yes |
Bibliographical note
Publisher Copyright:© 2020, Springer Nature B.V.
Keywords
- DIBL
- Hetro-dielectric (HD)
- Junctionless
- Leakage current
- Nanotube (NT)
- SS
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