Abstract
We studied the stability of the mechanical properties and the fatigue endurance of Gd-doped ceria (CGO), which is a promising electromechanically active material for microelectromechanical systems (MEMS). Specifically, the fracture strength and long-term operation of plate-type circular (2 mm diameter) thermal actuators made of ≈1.15 μm thick Ce0.95Gd0.05O1.975 (CGO5) were investigated. Excitation voltage of 10 V at the frequency range between 1 and 2.1 MHz induces Joule heating effect that can generate an in-plane strain of ≈0.1 %. The operation temperature ranged from 25 °C to 80 °C and the temperature shift, caused by the AC heating, was about 80 K at 10 V. Critical fracture was found to occur at out-of-plane displacements between ∼35 and ∼42 μm, which corresponds to the average bending stress of ∼44 MPa at the center of the plate. During long-term operation, the actuators exhibit gradual decrease in the response, probably due to contact degradation. However, structural damage or mechanical fatigue was not found even after 107 cycles at a stress level of ∼30 % of the critical fracture strength.
Original language | English |
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Article number | 111885 |
Journal | Sensors and Actuators, A: Physical |
Volume | 304 |
DOIs | |
State | Published - 1 Apr 2020 |
Externally published | Yes |
Bibliographical note
Publisher Copyright:© 2020 Elsevier B.V.
Funding
Part of this work was developed within the scope of the project CICECO-Aveiro Institute of Materials, UIDB/50011/2020 & UIDP/50011/2020, financed by national funds through the FCT/MEC and when appropriate co-financed by FEDER under the PT2020 Partnership Agreement. The equipment of the Ural Center for Shared Use “Modern Nanotechnology” UrFU was used. The research was made possible in part by RFBR (grant 15-52-06006 MNTI_a). The work has been supported in part by the Ministry of Science and Higher Education of the Russian Federation under Project # 3.9534.2017/8.9 . The work was supported by Government of the Russian Federation (Act 211, Agreement 02.A03.21.0006). S. Krylov acknowledges the support from the Henry and Dinah Krongold Chair of Microelectronics . Y. Shacham-Diamand acknowledges the support from the Bernard L. Schwartz Chair of NanoScale Information Technologies . This work was supported in part by the Israeli Ministry of Science and Technology grant No 3-12421 and #12421-3, the program of Israel-Russian Federation Scientific Collaboration. This work is part of the BioWings project, which has received funding from the European Union's Horizon 2020 under the Future and Emerging Technologies FET program with a grant agreement No 801267. This research received funding from the Minerva Center for Self-Repairing Systems for Energy & Sustainability and it is made possible in part by the historic generosity of the Harold Perlman Family. The DRIE unit used for this research was purchased with the Israel Science Foundation Grant # 2366/17. Part of this work was developed within the scope of the project CICECO-Aveiro Institute of Materials, UIDB/50011/2020 & UIDP/50011/2020, financed by national funds through the FCT/MEC and when appropriate co-financed by FEDER under the PT2020 Partnership Agreement. The equipment of the Ural Center for Shared Use ?Modern Nanotechnology? UrFU was used. The research was made possible in part by RFBR (grant 15-52-06006 MNTI_a). The work has been supported in part by the Ministry of Science and Higher Education of the Russian Federation under Project #3.9534.2017/8.9. The work was supported by Government of the Russian Federation (Act 211, Agreement 02.A03.21.0006). S. Krylov acknowledges the support from the Henry and Dinah Krongold Chair of Microelectronics. Y. Shacham-Diamand acknowledges the support from the Bernard L. Schwartz Chair of NanoScale Information Technologies. This work was supported in part by the Israeli Ministry of Science and Technology grant No 3-12421 and # 12421-3 , the program of Israel-Russian Federation Scientific Collaboration . This work is part of the BioWings project, which has received funding from the European Union's Horizon 2020 under the Future and Emerging Technologies FET program with a grant agreement No 801267. This research received funding from the Minerva Center for Self-Repairing Systems for Energy & Sustainability and it is made possible in part by the historic generosity of the Harold Perlman Family. The DRIE unit used for this research was purchased with the Israel Science Foundation Grant # 2366/17.
Funders | Funder number |
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FCT/MEC | |
Israel-Russian Federation Scientific Collaboration | |
Israeli ministry of science and technology | 3-12421, 12421-3 |
Minerva Center for Self-Repairing Systems for Energy & Sustainability | |
Horizon 2020 Framework Programme | |
European Commission | |
Fundação para a Ciência e a Tecnologia | |
Russian Foundation for Basic Research | 15-52-06006 MNTI_a |
Ministerio de Economía y Competitividad | |
Ministry of Education and Science of the Russian Federation | |
Israel Science Foundation | UIDP/50011/2020, 2366/17, UIDB/50011/2020 |
Ministry of science and technology, Israel | |
Horizon 2020 | 801267 |
European Regional Development Fund | |
Government Council on Grants, Russian Federation | |
Ministry of Science and Higher Education of the Russian Federation | 3.9534.2017/8.9 |
Keywords
- Actuator
- Doped ceria
- Fatigue
- MEMS