TY - JOUR
T1 - Flexible planar Hall effect sensor with sub-200 pT resolution
AU - Nhalil, Hariharan
AU - Lahav, Daniel
AU - Schultz, Moty
AU - Amrusi, Shai
AU - Grosz, Asaf
AU - Klein, Lior
N1 - Publisher Copyright:
© 2023 Author(s).
PY - 2023/7/10
Y1 - 2023/7/10
N2 - Flexible sensors are important for applications, such as wearable medical devices, soft robotics, and more, as they can easily conform to soft and irregularly shaped surfaces. This study presents elliptical planar Hall effect magnetic sensors fabricated on a polyamide tape with an equivalent magnetic noise (EMN) better than 200 pT/ Hz . The sensor is characterized in flat and bent states with a bent radius of 10 mm. An EMN of 200 and 400 pT/ Hz in flat and bent states, respectively, is achieved at a frequency of 100 Hz. The remarkable EMN combined with a simple, low-cost fabrication process makes these sensors a promising candidate for flexible electronics.
AB - Flexible sensors are important for applications, such as wearable medical devices, soft robotics, and more, as they can easily conform to soft and irregularly shaped surfaces. This study presents elliptical planar Hall effect magnetic sensors fabricated on a polyamide tape with an equivalent magnetic noise (EMN) better than 200 pT/ Hz . The sensor is characterized in flat and bent states with a bent radius of 10 mm. An EMN of 200 and 400 pT/ Hz in flat and bent states, respectively, is achieved at a frequency of 100 Hz. The remarkable EMN combined with a simple, low-cost fabrication process makes these sensors a promising candidate for flexible electronics.
UR - http://www.scopus.com/inward/record.url?scp=85164819289&partnerID=8YFLogxK
U2 - 10.1063/5.0156588
DO - 10.1063/5.0156588
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AN - SCOPUS:85164819289
SN - 0003-6951
VL - 123
JO - Applied Physics Letters
JF - Applied Physics Letters
IS - 2
M1 - 024102
ER -