Abstract
We have deposited unhydrogenated diamond-like carbon (DLC) films with 100 femtosecond laser pulses, at intensities in the 3×1014 - 6.5×1015 W/cm2 range. Film surface topography, optical property, and bonding structure were examined, respectively, with atomic force microscopy (AFM), spectroscopic ellipsometry (SE) and Raman spectrometry. The femtosecond pulse generated plasma was studied through time-of-flight (TOF) experiment. The most probable kinetic energy of carbon ions was estimated to be in the 300 - 2000 eV range, increasing with laser intensity. In addition, a unique 'suprathermal' component with kinetic energy ranging from 4 to 40 keV was observed in the TOF spectrum. This high energy peak is believed to originate from fast ions in a solid density plasma created during the absorption of each femtosecond laser pulse.
| Original language | English |
|---|---|
| Pages (from-to) | 297-302 |
| Number of pages | 6 |
| Journal | Materials Research Society Symposium - Proceedings |
| Volume | 397 |
| State | Published - 1996 |
| Externally published | Yes |
| Event | Proceedings of the 1995 MRS Fall Meeting - Boston, MA, USA Duration: 26 Nov 1995 → 1 Dec 1995 |