Femtosecond laser deposition of diamond-like carbon films

F. Qian, R. K. Singh, S. Dutta, P. P. Pronko, W. H. Weber

Research output: Contribution to journalConference articlepeer-review

7 Scopus citations


We have deposited unhydrogenated diamond-like carbon (DLC) films with 100 femtosecond laser pulses, at intensities in the 3×1014 - 6.5×1015 W/cm2 range. Film surface topography, optical property, and bonding structure were examined, respectively, with atomic force microscopy (AFM), spectroscopic ellipsometry (SE) and Raman spectrometry. The femtosecond pulse generated plasma was studied through time-of-flight (TOF) experiment. The most probable kinetic energy of carbon ions was estimated to be in the 300 - 2000 eV range, increasing with laser intensity. In addition, a unique 'suprathermal' component with kinetic energy ranging from 4 to 40 keV was observed in the TOF spectrum. This high energy peak is believed to originate from fast ions in a solid density plasma created during the absorption of each femtosecond laser pulse.

Original languageEnglish
Pages (from-to)297-302
Number of pages6
JournalMaterials Research Society Symposium - Proceedings
StatePublished - 1996
Externally publishedYes
EventProceedings of the 1995 MRS Fall Meeting - Boston, MA, USA
Duration: 26 Nov 19951 Dec 1995


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