Abstract
The frequency dependence of the capacitance variation between dark and near-infrared-modulated illumination conditions is measured for metal-oxide-semiconductor structures with germanium nanocrystals embedded in a thick SiO2 film grown on a silicon substrate. The results have shown that the device is expected to be sensitive at high frequencies (up to 111 GHz) making it a good candidate for optoelectronic high-speed use and for optical communication applications.
| Original language | English |
|---|---|
| Article number | 036001 |
| Journal | Journal of Nanophotonics |
| Volume | 10 |
| Issue number | 3 |
| DOIs | |
| State | Published - 1 Jul 2016 |
Bibliographical note
Publisher Copyright:© 2016 Society of Photo-Optical Instrumentation Engineers (SPIE).
Keywords
- Metal-oxide-semiconductor capacitor
- capacitance-voltage measurement
- germanium
- nanocrystal
- optoelectronic effect
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