Fabrication of nanofluidic devices using glass-to-glass anodic bonding

Vladimir G. Kutchoukov; Frederic Laugere; Wim Van Der Vlist; Lukasz Pakula; Yuval Garini; Andre Bossche

doi:10.1016/j.sna.2003.12.027

Fabrication of nanofluidic devices using glass-to-glass anodic bonding

Vladimir G. Kutchoukov, Frederic Laugere, Wim Van Der Vlist, Lukasz Pakula, Yuval Garini, Andre Bossche

Delft University of Technology

Research output: Contribution to journal › Conference article › peer-review

83 Scopus citations

Abstract

In this work, we present a technology for fabrication of nanochannels created in glass with which bio-analysis can be performed in combination with fluorescence microscopy. The technology is based on a glass-to-glass anodic bonding process. In the bonding process, an intermediate layer (thin insulating film) is deposited on one of the two glass wafers. The channel is then defined, with one or two photo-patterning steps, in the intermediate layer. In our approach, a 33nm thick amorphous silicon layer deposited by low-pressure chemical vapor deposition (LPCVD) was used as an intermediate layer. The depth of the channel is defined during the etching of this layer.

Original language	English
Pages (from-to)	521-527
Number of pages	7
Journal	Sensors and Actuators, A: Physical
Volume	114
Issue number	2-3
DOIs	https://doi.org/10.1016/j.sna.2003.12.027
State	Published - 1 Sep 2004
Externally published	Yes
Event	Selected Papers from Transducers 03 - Boston, MA, United States Duration: 8 Jun 2003 → 12 Jun 2003

Bibliographical note

Funding Information:
This work was supported and financed by Foundation for Fundamental Research on Matter (FOM) and was carried out in the clean room of the Delft Institute of Microelectronics and Submicron Technology (DIMES), The Netherlands. The authors also would like to thank in particular Bullen Ultrasonics, USA, represented by JVS Sales & Technical Consultants GmbH, Germany

Funding

This work was supported and financed by Foundation for Fundamental Research on Matter (FOM) and was carried out in the clean room of the Delft Institute of Microelectronics and Submicron Technology (DIMES), The Netherlands. The authors also would like to thank in particular Bullen Ultrasonics, USA, represented by JVS Sales & Technical Consultants GmbH, Germany

Funders	Funder number
Delft Institute of Microelectronics and Submicron Technology
Foundation for Fundamental Research on Matter

Keywords

Anodic bonding
Fluorescence
Nanochannels
Nanofluidic device
Separation device

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10.1016/j.sna.2003.12.027

Cite this

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title = "Fabrication of nanofluidic devices using glass-to-glass anodic bonding",

abstract = "In this work, we present a technology for fabrication of nanochannels created in glass with which bio-analysis can be performed in combination with fluorescence microscopy. The technology is based on a glass-to-glass anodic bonding process. In the bonding process, an intermediate layer (thin insulating film) is deposited on one of the two glass wafers. The channel is then defined, with one or two photo-patterning steps, in the intermediate layer. In our approach, a 33nm thick amorphous silicon layer deposited by low-pressure chemical vapor deposition (LPCVD) was used as an intermediate layer. The depth of the channel is defined during the etching of this layer.",

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author = "Kutchoukov, {Vladimir G.} and Frederic Laugere and {Van Der Vlist}, Wim and Lukasz Pakula and Yuval Garini and Andre Bossche",

note = "Funding Information: This work was supported and financed by Foundation for Fundamental Research on Matter (FOM) and was carried out in the clean room of the Delft Institute of Microelectronics and Submicron Technology (DIMES), The Netherlands. The authors also would like to thank in particular Bullen Ultrasonics, USA, represented by JVS Sales & Technical Consultants GmbH, Germany ; Selected Papers from Transducers 03 ; Conference date: 08-06-2003 Through 12-06-2003",

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AU - Laugere, Frederic

AU - Van Der Vlist, Wim

AU - Pakula, Lukasz

AU - Garini, Yuval

AU - Bossche, Andre

N1 - Funding Information: This work was supported and financed by Foundation for Fundamental Research on Matter (FOM) and was carried out in the clean room of the Delft Institute of Microelectronics and Submicron Technology (DIMES), The Netherlands. The authors also would like to thank in particular Bullen Ultrasonics, USA, represented by JVS Sales & Technical Consultants GmbH, Germany

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AB - In this work, we present a technology for fabrication of nanochannels created in glass with which bio-analysis can be performed in combination with fluorescence microscopy. The technology is based on a glass-to-glass anodic bonding process. In the bonding process, an intermediate layer (thin insulating film) is deposited on one of the two glass wafers. The channel is then defined, with one or two photo-patterning steps, in the intermediate layer. In our approach, a 33nm thick amorphous silicon layer deposited by low-pressure chemical vapor deposition (LPCVD) was used as an intermediate layer. The depth of the channel is defined during the etching of this layer.

KW - Anodic bonding

KW - Fluorescence

KW - Nanochannels

KW - Nanofluidic device

KW - Separation device

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Fabrication of nanofluidic devices using glass-to-glass anodic bonding

Abstract

Bibliographical note

Funding

Keywords

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