Fabrication of nanofluidic devices in glass with polysilicon electrodes

V. G. Kutchoukov; L. Pakula; G. O.F. Parikesit; Y. Garini; L. K. Nanver; A. Bossche

doi:10.1016/j.sna.2005.02.030

Fabrication of nanofluidic devices in glass with polysilicon electrodes

V. G. Kutchoukov
, L. Pakula
, G. O.F. Parikesit
, Y. Garini
, L. K. Nanver
, A. Bossche

Delft University of Technology

Research output: Contribution to journal › Article › peer-review

18 Scopus citations

Abstract

In this paper we present a novel fluidic device created in glass with polysilicon electrodes. We show that it is possible to fabricate electrodes with a sheet resistance of about 400 Ω/□ in the a:Si layer, used as an intermediate layer for the anodic bonding of two sodium containing glass wafers in which nanochannels have been etched. The fabricated polysilicon electrodes could be partly coated with a metal to reduce the resistance of the electrodes. Further research to use the fabricated fluidic devices on detecting and manipulating single molecules in solution is ongoing and will be reported elsewhere.

Original language	English
Pages (from-to)	602-607
Number of pages	6
Journal	Sensors and Actuators, A: Physical
Volume	123-124
DOIs	https://doi.org/10.1016/j.sna.2005.02.030
State	Published - 23 Sep 2005
Externally published	Yes

Bibliographical note

Funding Information:
The authors would like to thank the DIMES (Delft Institute of Microelectronics and Submicrontechnology) IC processing group for their contribution to the device fabrication and characterisation, in particular Tom Scholtes, John Slabbekoorn and Wim Verveer. This research was supported financially by FOM (Dutch Foundation for Fundamental Research on Matter).

Funding

The authors would like to thank the DIMES (Delft Institute of Microelectronics and Submicrontechnology) IC processing group for their contribution to the device fabrication and characterisation, in particular Tom Scholtes, John Slabbekoorn and Wim Verveer. This research was supported financially by FOM (Dutch Foundation for Fundamental Research on Matter).

Funders
Stichting voor Fundamenteel Onderzoek der Materie
Foundation for Fundamental Research on Matter

Keywords

Anodic bonding
Glass
Nanochannels
Nanofluidic device

Access to Document

10.1016/j.sna.2005.02.030

Cite this

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abstract = "In this paper we present a novel fluidic device created in glass with polysilicon electrodes. We show that it is possible to fabricate electrodes with a sheet resistance of about 400 Ω/□ in the a:Si layer, used as an intermediate layer for the anodic bonding of two sodium containing glass wafers in which nanochannels have been etched. The fabricated polysilicon electrodes could be partly coated with a metal to reduce the resistance of the electrodes. Further research to use the fabricated fluidic devices on detecting and manipulating single molecules in solution is ongoing and will be reported elsewhere.",

keywords = "Anodic bonding, Glass, Nanochannels, Nanofluidic device",

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note = "Funding Information: The authors would like to thank the DIMES (Delft Institute of Microelectronics and Submicrontechnology) IC processing group for their contribution to the device fabrication and characterisation, in particular Tom Scholtes, John Slabbekoorn and Wim Verveer. This research was supported financially by FOM (Dutch Foundation for Fundamental Research on Matter). ",

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AU - Pakula, L.

AU - Parikesit, G. O.F.

AU - Garini, Y.

AU - Nanver, L. K.

AU - Bossche, A.

N1 - Funding Information: The authors would like to thank the DIMES (Delft Institute of Microelectronics and Submicrontechnology) IC processing group for their contribution to the device fabrication and characterisation, in particular Tom Scholtes, John Slabbekoorn and Wim Verveer. This research was supported financially by FOM (Dutch Foundation for Fundamental Research on Matter).

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N2 - In this paper we present a novel fluidic device created in glass with polysilicon electrodes. We show that it is possible to fabricate electrodes with a sheet resistance of about 400 Ω/□ in the a:Si layer, used as an intermediate layer for the anodic bonding of two sodium containing glass wafers in which nanochannels have been etched. The fabricated polysilicon electrodes could be partly coated with a metal to reduce the resistance of the electrodes. Further research to use the fabricated fluidic devices on detecting and manipulating single molecules in solution is ongoing and will be reported elsewhere.

AB - In this paper we present a novel fluidic device created in glass with polysilicon electrodes. We show that it is possible to fabricate electrodes with a sheet resistance of about 400 Ω/□ in the a:Si layer, used as an intermediate layer for the anodic bonding of two sodium containing glass wafers in which nanochannels have been etched. The fabricated polysilicon electrodes could be partly coated with a metal to reduce the resistance of the electrodes. Further research to use the fabricated fluidic devices on detecting and manipulating single molecules in solution is ongoing and will be reported elsewhere.

KW - Anodic bonding

KW - Glass

KW - Nanochannels

KW - Nanofluidic device

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JO - Sensors and Actuators, A: Physical

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ER -

Fabrication of nanofluidic devices in glass with polysilicon electrodes

Abstract

Bibliographical note

Funding

Keywords

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