Fabrication of nanofluidic devices in glass with polysilicon electrodes

V. G. Kutchoukov, L. Pakula, G. O.F. Parikesit, Y. Garini, L. K. Nanver, A. Bossche

Research output: Contribution to journalArticlepeer-review

18 Scopus citations

Abstract

In this paper we present a novel fluidic device created in glass with polysilicon electrodes. We show that it is possible to fabricate electrodes with a sheet resistance of about 400 Ω/□ in the a:Si layer, used as an intermediate layer for the anodic bonding of two sodium containing glass wafers in which nanochannels have been etched. The fabricated polysilicon electrodes could be partly coated with a metal to reduce the resistance of the electrodes. Further research to use the fabricated fluidic devices on detecting and manipulating single molecules in solution is ongoing and will be reported elsewhere.

Original languageEnglish
Pages (from-to)602-607
Number of pages6
JournalSensors and Actuators, A: Physical
Volume123-124
DOIs
StatePublished - 23 Sep 2005
Externally publishedYes

Bibliographical note

Funding Information:
The authors would like to thank the DIMES (Delft Institute of Microelectronics and Submicrontechnology) IC processing group for their contribution to the device fabrication and characterisation, in particular Tom Scholtes, John Slabbekoorn and Wim Verveer. This research was supported financially by FOM (Dutch Foundation for Fundamental Research on Matter).

Keywords

  • Anodic bonding
  • Glass
  • Nanochannels
  • Nanofluidic device

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