Fabrication of nanochannels using glass to glass anodic bonding

V. G. Kutchoukov; F. Laugere; W. Van Der Vlist; L. Pakula; Y. Garini; P. F.A. Alkemade; A. Bossche

doi:10.1109/sensor.2003.1217018

Fabrication of nanochannels using glass to glass anodic bonding

V. G. Kutchoukov
, F. Laugere
, W. Van Der Vlist
, L. Pakula
, Y. Garini
, P. F.A. Alkemade
, A. Bossche

Delft University of Technology

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

4 Scopus citations

Abstract

In this work, we present a technology for fabrication of nanochannels created in glass with which bio-analysis can be performed in combination with fluorescence microscopy. The technology is based on a glass-to-glass anodic bonding process. In the bonding process, an intermediate layer (thin insulating film) is deposited on one of the two glass wafers. The channel is then defined, with one photo-patterning step, in the intermediate layer. In our approach, a 33 nm thick amorphous silicon layer (deposited by LPCVD) was used as an intermediate layer. The depth of the channel is defined during the etching of this layer.

Original language	English
Title of host publication	TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	1327-1330
Number of pages	4
ISBN (Electronic)	0780377311, 9780780377318
DOIs	https://doi.org/10.1109/sensor.2003.1217018
State	Published - 2003
Externally published	Yes
Event	12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers - Boston, United States Duration: 8 Jun 2003 → 12 Jun 2003

Publication series

Name	TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
Volume	2

Conference

Conference	12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers
Country/Territory	United States
City	Boston
Period	8/06/03 → 12/06/03

Bibliographical note

Publisher Copyright:
© 2003 IEEE.

Keywords

Amorphous silicon
Etching
Fluorescence
Glass
Microscopy
Nanobioscience
Optical device fabrication
Optical films
Optical imaging
Wafer bonding

Access to Document

10.1109/sensor.2003.1217018

Cite this

Kutchoukov, V. G., Laugere, F., Van Der Vlist, W., Pakula, L., Garini, Y., Alkemade, P. F. A., & Bossche, A. (2003). Fabrication of nanochannels using glass to glass anodic bonding. In TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers (pp. 1327-1330). Article 1217018 (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers; Vol. 2). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/sensor.2003.1217018

Kutchoukov, V. G. ; Laugere, F. ; Van Der Vlist, W. et al. / Fabrication of nanochannels using glass to glass anodic bonding. TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. Institute of Electrical and Electronics Engineers Inc., 2003. pp. 1327-1330 (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers).

@inproceedings{3950e5db6f4d44169c3e8bc5215d61a7,

title = "Fabrication of nanochannels using glass to glass anodic bonding",

abstract = "In this work, we present a technology for fabrication of nanochannels created in glass with which bio-analysis can be performed in combination with fluorescence microscopy. The technology is based on a glass-to-glass anodic bonding process. In the bonding process, an intermediate layer (thin insulating film) is deposited on one of the two glass wafers. The channel is then defined, with one photo-patterning step, in the intermediate layer. In our approach, a 33 nm thick amorphous silicon layer (deposited by LPCVD) was used as an intermediate layer. The depth of the channel is defined during the etching of this layer.",

keywords = "Amorphous silicon, Etching, Fluorescence, Glass, Microscopy, Nanobioscience, Optical device fabrication, Optical films, Optical imaging, Wafer bonding",

author = "Kutchoukov, \{V. G.\} and F. Laugere and \{Van Der Vlist\}, W. and L. Pakula and Y. Garini and Alkemade, \{P. F.A.\} and A. Bossche",

note = "Publisher Copyright: {\textcopyright} 2003 IEEE.; 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers ; Conference date: 08-06-2003 Through 12-06-2003",

year = "2003",

doi = "10.1109/sensor.2003.1217018",

language = "אנגלית",

series = "TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "1327--1330",

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Kutchoukov, VG, Laugere, F, Van Der Vlist, W, Pakula, L, Garini, Y, Alkemade, PFA & Bossche, A 2003, Fabrication of nanochannels using glass to glass anodic bonding. in TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers., 1217018, TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers, vol. 2, Institute of Electrical and Electronics Engineers Inc., pp. 1327-1330, 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers, Boston, United States, 8/06/03. https://doi.org/10.1109/sensor.2003.1217018

Fabrication of nanochannels using glass to glass anodic bonding. / Kutchoukov, V. G.; Laugere, F.; Van Der Vlist, W. et al.
TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. Institute of Electrical and Electronics Engineers Inc., 2003. p. 1327-1330 1217018 (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers; Vol. 2).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Fabrication of nanochannels using glass to glass anodic bonding

AU - Kutchoukov, V. G.

AU - Laugere, F.

AU - Van Der Vlist, W.

AU - Pakula, L.

AU - Garini, Y.

AU - Alkemade, P. F.A.

AU - Bossche, A.

PY - 2003

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N2 - In this work, we present a technology for fabrication of nanochannels created in glass with which bio-analysis can be performed in combination with fluorescence microscopy. The technology is based on a glass-to-glass anodic bonding process. In the bonding process, an intermediate layer (thin insulating film) is deposited on one of the two glass wafers. The channel is then defined, with one photo-patterning step, in the intermediate layer. In our approach, a 33 nm thick amorphous silicon layer (deposited by LPCVD) was used as an intermediate layer. The depth of the channel is defined during the etching of this layer.

AB - In this work, we present a technology for fabrication of nanochannels created in glass with which bio-analysis can be performed in combination with fluorescence microscopy. The technology is based on a glass-to-glass anodic bonding process. In the bonding process, an intermediate layer (thin insulating film) is deposited on one of the two glass wafers. The channel is then defined, with one photo-patterning step, in the intermediate layer. In our approach, a 33 nm thick amorphous silicon layer (deposited by LPCVD) was used as an intermediate layer. The depth of the channel is defined during the etching of this layer.

KW - Amorphous silicon

KW - Etching

KW - Fluorescence

KW - Glass

KW - Microscopy

KW - Nanobioscience

KW - Optical device fabrication

KW - Optical films

KW - Optical imaging

KW - Wafer bonding

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BT - TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers

Y2 - 8 June 2003 through 12 June 2003

ER -

Kutchoukov VG, Laugere F, Van Der Vlist W, Pakula L, Garini Y, Alkemade PFA et al. Fabrication of nanochannels using glass to glass anodic bonding. In TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. Institute of Electrical and Electronics Engineers Inc. 2003. p. 1327-1330. 1217018. (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers). doi: 10.1109/sensor.2003.1217018

Fabrication of nanochannels using glass to glass anodic bonding

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Keywords

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