TY - JOUR
T1 - Fabrication of electro optical nano modulator on silicon chip
AU - Limon, Ofer
AU - Businaro, Luca
AU - Gerardino, Annamaria
AU - Bitton, Liora
AU - Frydman, Aviad
AU - Zalevsky, Zeev
PY - 2009/4
Y1 - 2009/4
N2 - In this paper, we present the fabrication and preliminary measurements of a novel electro optical nano modulator on silicon chip based on light scattering by a movable 50 nm charged gold colloid particle. The idea is to modulate the 1.55 μm light by electrically manipulating the highly conductive particle in a nano air gap created in a silicon waveguide to cause high scattering and absorption. With a length of 150 nm of the air gap, the expected modulation rates can exceed few GHz while being implemented on a highly dense silicon chip.
AB - In this paper, we present the fabrication and preliminary measurements of a novel electro optical nano modulator on silicon chip based on light scattering by a movable 50 nm charged gold colloid particle. The idea is to modulate the 1.55 μm light by electrically manipulating the highly conductive particle in a nano air gap created in a silicon waveguide to cause high scattering and absorption. With a length of 150 nm of the air gap, the expected modulation rates can exceed few GHz while being implemented on a highly dense silicon chip.
KW - Electro optical modulator
KW - Integrated optics
KW - Nano particle
KW - Silicon chip
UR - http://www.scopus.com/inward/record.url?scp=67349270291&partnerID=8YFLogxK
U2 - 10.1016/j.mee.2009.01.007
DO - 10.1016/j.mee.2009.01.007
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AN - SCOPUS:67349270291
SN - 0167-9317
VL - 86
SP - 1099
EP - 1102
JO - Microelectronic Engineering
JF - Microelectronic Engineering
IS - 4-6
ER -