Fabrication of a barium titanate-strontium titanate strained layer superlattice

S. D. Harkness, R. K. Singh

Research output: Contribution to journalConference articlepeer-review


A thin film superlattice heterostructure composed of alternating BaTiO3 and SrTiO3 layers was grown on a thin YBa2Cu3O7 electrode templated on a (100) SrTiO3 wafer using the pulsed laser deposition method. Stranski-Krastanov nucleation of the layers was demonstrated using atomic force microscopy (AFM) when processing conditions were maintained at 6 millitorr oxygen partial pressure, and 550°C substrate temperatures. High-resolution x-ray diffraction (HRXRD) measurements indicate that all the deformation was concentrated in the BaTiO3 layers with c/a extension to approximately 1.08. Rutherford backscattering spectroscopy (RBS) results indicate excellent crystallinity in the heterostructure. The microstructural data suggests that the theoretical critical thickness of the film has been surpassed by an order of magnitude.

Original languageEnglish
Pages (from-to)211-216
Number of pages6
JournalMaterials Research Society Symposium - Proceedings
StatePublished - 1996
Externally publishedYes
EventProceedings of the 1995 MRS Fall Meeting - Boston, MA, USA
Duration: 26 Nov 19951 Dec 1995


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