Fabrication and characterisation of triangle-faced single crystal diamond micro-cantilevers

Benjamin Z. Kupfer, Rezal K. Ahmad, Aiman Zainal, Richard B. Jackman

Research output: Contribution to journalArticlepeer-review

19 Scopus citations


Single crystal diamond offers superior properties for MEMS applications to polycrystalline forms of this material. Here, a process based solely on focussed ion beam milling (Ga), has been used to fabricate nanometre-width diamond cantilevers we lengths of several tens of microns. The procedure results in low damage structures with little Ga incorporation, following post-fabrication annealing. The triangular profile of a cantilever produced using this technique is shown, theoretically, to have a factor of three improved defection response to a load typically encountered during chemical sensing compared to a conventional rectangular lever of similar dimensions.

Original languageEnglish
Pages (from-to)742-747
Number of pages6
JournalDiamond and Related Materials
Issue number7-9
StatePublished - Jul 2010
Externally publishedYes


  • Diamond
  • FIB
  • MEMS
  • Sensors


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