We demonstrate self-aligned approach for fabrication of hybrid silicon plasmonic waveguide. The demonstrated structure provides both nanoscale confinement together with propagation length of 100 microns. Near-field measurements of propagation and coupling loss are also presented.
|Title of host publication||Quantum Electronics and Laser Science Conference, QELS 2011|
|State||Published - 2011|
|Event||Quantum Electronics and Laser Science Conference, QELS 2011 - Baltimore, MD, United States|
Duration: 1 May 2011 → 6 May 2011
|Name||Optics InfoBase Conference Papers|
|Conference||Quantum Electronics and Laser Science Conference, QELS 2011|
|Period||1/05/11 → 6/05/11|