Evaluation of subsurface damage inherent to polished GaN substrates using depth-resolved cathodoluminescence spectroscopy

Jinhyung Lee, Jong Cheol Kim, Jongsik Kim, Rajiv K. Singh, Arul C. Arjunan, Haigun Lee

Research output: Contribution to journalArticlepeer-review

16 Scopus citations

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Keyphrases

Earth and Planetary Sciences

Chemistry

Engineering

Physics

Material Science